2D Phase masks
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Ibsen introduces 2D Phase masks for the one-step generation of 2D square lattice grating patterns on planar wafers.
2D gratings can now be manufactured by the established Phase mask principles by simply exposing the wafer through an Ibsen 2D Phase mask at Bragg angle incidence, similar to the well known NFH Phase mask mode of operation (i.e. Bragg angle illumination).
By single exposure through an Ibsen Phase mask, and subsequent development of the photo-resist, 2D square lattice grating structures such as the below can be written over large areas on a wafer.
(Note: the apparent assymetry in the grating profile is an artefact of the AFM tip.)
Features
Important features of our line of 2D Phase masks are:
- Single exposure process for 2D square lattice grating structures
- Square lattice periodicity possible down to 200 nm
- Period accuracy and uniformity of +/- 0.01 nm
- Hole diameter is controlled by exposure time
- High contrast in interference pattern
- Inherently free of stitching errors.
- Optimized to illumination wavelength from 193-435 nm
- Can be optimized to any polarization - including unpolarized
- Phase mask parameters are individually specified - including unique part number - on each Phase mask.
Principle
The 2D square lattice Phase mask is illuminated at the Bragg angle, similar to the well known 0/-1 order Phase mask principle. The 2D Phase mask diffracts this illumination into multiple orders - the coherent interference pattern between these accurately reproduces the 2D Phase mask periodicity. Our innovative production techniques allow us to manufacture Phase masks with periods down to 200 nm, while the 2D Phase mask principle of operation limits the upper lattice periodicity to 687 nm (with 435 nm illumination).
The Bragg angle is given by the following equation:
For a given illumination wavelength, the fundamentally possible periodicities are given by the following Criteria of Suitability:
, where Λ is the 2D grating periodicity and λ is the illumination wavelength.
Product range and Specifications
Here:
| Parameter | Specification |
|---|---|
| Grating periods | 200 nm - 687 nm |
| Illumination wavelengths | 193 nm - 435 nm |
| Material | UV grade fused silica |
| Period accuracy | +/- 0.01 nm |
| Period uniformity | +/- 0.01 nm |
| Standard grating sizes | 10 mm x 10 mm |
| Ø1" | |
| Ø2" |
Ordering
Request a quotation on-line by following the quote link at the upper right of this page.
Download
You can download the product sheet below, or request us to e-mail you one by following the "request brochure" link at the upper right of the page.
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